Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
Appearance
No edit summary |
|||
| Line 71: | Line 71: | ||
|style="background:LightGrey; color:black"|Scan speed | |style="background:LightGrey; color:black"|Scan speed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|200 MHz | ||
|style="background:WhiteSmoke; color:black"|20 MHz | |style="background:WhiteSmoke; color:black"|20 MHz | ||
|- | |- | ||