Jump to content

Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

Thope (talk | contribs)
No edit summary
Thope (talk | contribs)
Line 71: Line 71:


|style="background:LightGrey; color:black"|Scan speed
|style="background:LightGrey; color:black"|Scan speed
|style="background:WhiteSmoke; color:black"|100 MHz
|style="background:WhiteSmoke; color:black"|200 MHz
|style="background:WhiteSmoke; color:black"|20 MHz
|style="background:WhiteSmoke; color:black"|20 MHz
|-
|-