Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride: Difference between revisions
Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium_Nitride&action=submit click here]''' <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> == Deposition of Niobium Titanium Nitride == Deposition of ScN can only be done by reactive sputtering using Sc target. The on..." |
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<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> | <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> | ||
== Deposition of | == Deposition of Scandium Nitride == | ||
Deposition of ScN can only be done by reactive sputtering using Sc target. | Deposition of ScN can only be done by reactive sputtering using Sc target. | ||
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The only tool for this application is the Cluster-based multi-chamber high vacuum sputtering deposition system, commonly referred to as the 'Cluster Lesker.' The operating process is thoroughly documented and described in detail.: | The only tool for this application is the Cluster-based multi-chamber high vacuum sputtering deposition system, commonly referred to as the 'Cluster Lesker.' The operating process is thoroughly documented and described in detail.: | ||
* [[Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive RF Sputtering in Cluster Lesker PC3|Deposition of Scandium Nitride (Sc) using reactive | * [[Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive RF Sputtering in Cluster Lesker PC3|Deposition of Scandium Nitride (Sc) using reactive sputtering]] in Sputter-System Metal-Nitride(PC3) Source 1 (4-inch target) | ||
At the moment (October 2023) we have a 4-inch Sc target (0.250" thick bonded to Cu) for PC3 Src1. | At the moment (October 2023) we have a 4-inch Sc target (0.250" thick bonded to Cu) for PC3 Src1. | ||