Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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=Chip alignment - CHIPAL= | =Chip alignment - CHIPAL= | ||
If the exposure uses chip alignment it should be setup and tested with the CHIPAL subprogram. Any chip with a scan mark can be used to test the chip alignment settings, one must of course know the center position of the chip as defined with the '''ARRAY''' command in the JDF. | If the exposure uses chip alignment it should be setup and tested with the CHIPAL subprogram. Any chip with a scan mark can be used to test the chip alignment settings, one must of course know the center position of the chip as defined with the '''ARRAY''' command in the JDF. | ||
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In the '''Measurement mode''' choose '''Mode 1''' or '''Mode 4''' for one or four mark detection, respectively. Enter the chip center coordinates in the '''Chip center coordinate position''' (global coordinates). Enter the chip alignment marks (local chip coordinate system) in the '''Chip mark Mx design position''' fields. This will determine the position of the test scan. The scan parameters with the '''Settings''' button. In the settings window set the scan position close to the center of the mark, typically 10 µm. Make the scan width fairly small for best accuracy, just like for the rough scan the scan will consist of 4000 datapoints. Make sure the offsets are set to zero in the '''Offset''' pane and that the correct mark dimensions are set in the '''Scan type''' pane. Accept the parameters with '''OK''' and click '''Save''' and '''Execute''' in the '''CHIPAL''' window. | Select the '''CHIPAL''' subprogram and edit the parameters. In the '''Measurement mode''' choose '''Mode 1''' or '''Mode 4''' for one or four mark detection, respectively. Enter the chip center coordinates in the '''Chip center coordinate position''' (global coordinates). Enter the chip alignment marks (local chip coordinate system) in the '''Chip mark Mx design position''' fields. This will determine the position of the test scan. The scan parameters with the '''Settings''' button. In the settings window set the scan position close to the center of the mark, typically 10 µm. Make the scan width fairly small for best accuracy, just like for the rough scan the scan will consist of 4000 datapoints. Make sure the offsets are set to zero in the '''Offset''' pane and that the correct mark dimensions are set in the '''Scan type''' pane. Accept the parameters with '''OK''' and click '''Save''' and '''Execute''' in the '''CHIPAL''' window. | ||