Specific Process Knowledge/Etch/DRIE-Pegasus

This page is under construction

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.

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Some questions and answers

This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share valuable and useful information (instead of keeping it hidden deep in email correspondence).

• Hardware and setup

• Bonding wafers

• Problems with matching

• Mask materials

• Nanoetching