Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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=Chip alignment - CHIPAL= | =Chip alignment - CHIPAL= | ||
If the exposure uses chip alignment it should be setup and tested with the CHIPAL subprogram. | If the exposure uses chip alignment it should be setup and tested with the CHIPAL subprogram. | ||
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| [[image:CHIPAL2.png|400px]] || [[image:CHIPAL-scan.png|400px]] | |||
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CHIPAL parameter window and CHIPAL scan conditions. Image: Thomas Pedersen. | |||
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