Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
| Line 182: | Line 182: | ||
| colspan="2" style="text-align:center;| | | colspan="2" style="text-align:center;| | ||
Alignment marks used in this example. Image: Thomas Pedersen. | Alignment marks used in this example. Image: Thomas Pedersen. | ||
|} | |||
Once the P mark conditions are set up, setup the Q mark conditions in the same way. From the '''SETWFR''' window click '''Execute'''. The mark scan will start with the P mark rough scan, if the mark is found it will continue to P mark fine scan, if successful the system will continue with Q mark rough scan and finally Q mark fine scan. | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
|- | |||
| [[image:P_roughscan.png|400px]] || [[image:Q_finescan.png|400px]] || [[image:PQ_finaloffset.png|400px]] | |||
|- | |||
| colspan="2" style="text-align:center;| | |||
Examples of PQ mark detection scans. Left: P mark rough scan. Center: P mak fine scan. Right: Output in the '''Calib''' window. Image: Thomas Pedersen. | |||
|} | |} | ||