Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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 =Global alignment - SETWFR=
 The next step is to verify that it is possible to detect the P and Q marks, this is done with the '''SETWFR''' subprogram. Select it and edit the parameters.
+{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
+|-
+| [[image:SETWFR2.png|400px]] || [[image:Proughscan.png|400px]] || [[image:Proughscantype.png|400px]]
+|-
+| colspan="2" style="text-align:center;|
+The '''SETWFR''' window and '''Settings''' scan condition windows. Image: Thomas Pedersen.
+|}