Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions

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 In the '''Scan''' pane one can set the '''Scan position''' and '''Scan width''' to suitable values for the mark in question. In general one should scan a cross at a position half way from the center and at least a width of 300 µm to be sure to hit it. In the '''Offset''' pane make sure the offsets are all set to zero. Click '''Ok''' and execute the scan.
-The system will now scan the mark position and attempt to optimise the detected backscatter signal in an iterative loop. After a successful scan the last scan result is displayed.
+The system will now scan the mark position and attempt to optimise the detected backscatter signal in an iterative loop. After a successful scan the last scan result is displayed. It should show a distinct feature where the mark is detected. The aptly named '''Updating inquiry of a preamp constant''' window will also open. This shows the preamp constants along with a subprogram list that uses these the backscatter detector and hence these constants. Copy the constants to all subprograms by clicking '''Select''' and '''OK'''. Now all necessary subprograms have the correct gain/preamp settings.
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