Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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Choose the '''AGCRG''' subprogram from the calibration menu and edit the properties to set it up correctly. In order to optimise the gain it is naturally vital that the beam is actually scanning a mark. The easiest way to ensure this is to use the P mark stage coordinate from the prealigner output file. To do this, set the '''Stage shift classification''' to '''Stage coordinate system''' and enter the P mark stage coordinates from the prealigner in the '''Mark position''' fields. | Choose the '''AGCRG''' subprogram from the calibration menu and edit the properties to set it up correctly. In order to optimise the gain it is naturally vital that the beam is actually scanning a mark. The easiest way to ensure this is to use the P mark stage coordinate from the prealigner output file. To do this, set the '''Stage shift classification''' to '''Stage coordinate system''' and enter the P mark stage coordinates from the prealigner in the '''Mark position''' fields. The '''AGC conditions''' can typically be left as they are. | ||
Edit the scan conditions on the '''Settings''' button. | Edit the scan conditions on the '''Settings''' button. | ||
In the '''Scan''' pane one can set the '''Scan position''' and '''Scan width''' to suitable values for the mark in question. In general one should scan a cross at a position half way from the center and at least a width of 300 µm to be sure to hit it. In the '''Offset''' pane make sure the offsets are all set to zero. Click '''Ok''' and execute the scan. | In the '''Scan''' pane one can set the '''Scan position''' and '''Scan width''' to suitable values for the mark in question. In general one should scan a cross at a position half way from the center and at least a width of 300 µm to be sure to hit it. In the '''Offset''' pane make sure the offsets are all set to zero. Click '''Ok''' and execute the scan. | ||