Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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When you are done with the alignment station, please close the programs, log off the computer and turn the microscope illumination down. Alert a member of the loading team to have your prealigned substrates loaded to the auto stocker. | When you are done with the alignment station, please close the programs, log off the computer and turn the microscope illumination down. Alert a member of the loading team to have your prealigned substrates loaded to the auto stocker. | ||
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! width=100% | Example of output from the PAMS Metrology Tool | |||
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<pre> | <pre> | ||
PAMS Metrology Tool version 3.2.0.8 | PAMS Metrology Tool version 3.2.0.8 | ||
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end<> | end<> | ||
</pre> | </pre> | ||
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==System calibration== | ==System calibration== | ||