Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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*P mark shift relative to the slot center | *P mark shift relative to the slot center | ||
*Substrate rotation | *Substrate rotation | ||
*Gain | |||
To get started using the prealigner, place the cassette front side down and the hook away from yourself. Log in on the computer and load PAMS Metrology Tool and PAMS Image Viewer. Verify that the coordinate output is correct by moving to the stage zero marker mounted on the bottom right of the prealigner, zero it on the coordinate display panel if it is more than a few µm off. | |||
Move the stage to the center of your substrate, use the coordinates posted on the wall to find it easily. Find a feature that allows you to gauge the rotation, this can be a long straight line or two features that have the same Y-coordinate. Minimize the rotation by either rotating the slot using the set screws (not all cassettes have this) or by removing the substrate cover and rotate the substrate inside the slot. Rotation should be so low that the Y-coordinate difference between the P and Q marks is less than 500 µm. | |||
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