Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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==Temperature Measurement and Control== | ==Temperature Measurement and Control== | ||
The temperature of the substrate can be controlled by use of either a thermocouple (TC) or an optical pyrometer (Pyro). This control system is called the closed loop mode, i.e. the temperature control mode. An open loop mode (power control mode), on the other hand, is not recommended. In this case, the temperature of the substrate would vary according to the power emitted by the lamps established as setpoint, without any limiting check from the pyrometer or thermocouple. Thus, it can happen that the chamber is heated up very fast with no actual temperature control, which can induce serious damages to the tool. | |||
When using the temperature control mode, the thermocouple is usually the recommended sensor. However, this recommendation varies a lot depending on the desired conditions for the process. See the table below. | |||
==Samples and Process Specifications== | ==Samples and Process Specifications== | ||