Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
| Line 74: | Line 74: | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Pressure | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Pressure | ||
|style="background:Silver; color:black"| | |style="background:Silver; color:black"|No vacuum | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *Up to atmospheric pressure. | ||
|style="background:WhiteSmoke; color:black;" align="center"| | |style="background:WhiteSmoke; color:black;" align="center"| | ||
|- | |- | ||
|style="background:Silver; color:black"| | |style="background:Silver; color:black"|Vacuum | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *Low vacuum (min. 2/3 mbar) | ||
|style="background:WhiteSmoke; color:black;" align=" | |style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar with minimum gas flow. | ||
|- | |- | ||
!style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | !style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | ||