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Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions

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NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
462 edits
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* 400 <sup>o</sup>C to 1200 <sup>o</sup>C
* 400 <sup>o</sup>C to 1200 <sup>o</sup>C
|style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''.
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|style="background:Silver; color:black"|Thermocouple Control
|style="background:Silver; color:black"|Thermocouple Control
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|style="background:LightGrey; color:black"|
* Room temperature to 1200 <sup>o</sup>C
* Room temperature to 1200 <sup>o</sup>C
|style="background:WhiteSmoke; color:black;" align="left"| '''Power control is NOT ALLOWED for more than 10s.''' Chamber maximum power is '''56 kW'''.
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!style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas
!style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas
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