Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
| Line 9: | Line 9: | ||
=RTP2 Jipelec - Rapid Thermal Processor= | =RTP2 Jipelec - Rapid Thermal Processor= | ||
The main purpose of the RTP2 Jipelec is to perform thermal processes, using faster heating rates and shorter process durations when compared to conventional methods. This is called rapid thermal processing (RTP) and can be used to treat different types of samples. | |||
Rapid thermal processing typically includes RTA, i.e. Rapid Thermal Annealing, where samples are heated up very rapidly in a nitrogen or argon atmosphere. Contact alloying and RTN, i.e. Rapid Thermal Nitridation, might also be possible for some samples. | |||
==The Set-Up== | |||
[[Image:Jipelec RTP 2.jpg|650x650px|thumb|RTP Jipelec 2: Positioned in cleanroom A-5]] | [[Image:Jipelec RTP 2.jpg|650x650px|thumb|RTP Jipelec 2: Positioned in cleanroom A-5]] | ||