Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found here. Since Labadviser does not allow upload of .m files, simply copy the script from below and save as a .m file. | The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found here. Since Labadviser does not allow upload of .m files, simply copy the script from below and save as a .m file. | ||
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! width=100% | Example JDI file after PEC | |||
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%Modulation table modding for dose test of PEC'ed V30's, see Labadviser for further information | %Modulation table modding for dose test of PEC'ed V30's, see Labadviser for further information | ||
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The number of doses for dose testing is controlled by the parameter '''m''' while the increase in dose between doses is defined by '''modulation''', it is a percentwise change relative to the base dose. For instance, if one wants to do a dose test with 200 µC/cm<sup>2</sup> as base dose in steps of 10 µC/cm<sup>2</sup> one would set '''modulation = 5'''. | The number of doses for dose testing is controlled by the parameter '''m''' while the increase in dose between doses is defined by '''modulation''', it is a percentwise change relative to the base dose. For instance, if one wants to do a dose test with 200 µC/cm<sup>2</sup> as base dose in steps of 10 µC/cm<sup>2</sup> one would set '''modulation = 5'''. | ||