Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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=Scripted expansion of a PEC modulation table= | =Scripted expansion of a PEC modulation table= | ||
The last method is basically the same as the second method above but with support for PEC modulation. Thus in this method we will expand the PEC modulation table into a number of PEC and dose test modulated tables, i.e. we will get one unique table per dose. | |||