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Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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=Dose modulation in JDF=
=Dose modulation in JDF=
The '''MODULAT''' command can be used to modulate the base dose for a pattern and hence it can be used to generate a dose matrix. In this setup the SDF will contain a base dose defined by the '''RESIST''' command, this dose will then be modulated for different pattern instances defined in the referenced JDF. In this setup the SDF will only contain a single sequence as below.


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The arrray is setup with the '''ARRAY''' command in the JDF and at the end of the '''ASSIGN''' command a dose modulation can be applied. In this way each instance assignment can contain a different modulation. In the example below the pattern is instanced in a 10 x 1 matrix, each element has its own modulation table; SHOT1 to SHOT10. The definition of each modulation is stated at the end of the layer definition.
Pattern placement is controlled with the ARRAY command in the JDF. The goal of this example exposure is to create a dose test and thus we will use the ARRAY command to create an array of the pattern (the DTU logo) and we will use the MODULAT command to modulate the dose for each instance in the array. The ARRAY command takes six parameters as ARRAY(x,nx,dx)/(y,ny,dy), where x and y defines the center of the first element, nx and ny defines element numbers and dx and dy defines the array element pitch. The array defined in the example below will create a 10 x 1 array with an x-axis pitch of 50 µm.


Each array element is assigned a dose modulation using the MODULAT command. The MODULAT command takes two parameters as MODULAT(r,v), where r is the shot rank and v is the shot time modulation in %. The shot rank is defined during export from Beamer. For a simple design as used in this example that is not proximity corrected all elements of the pattern will be in shot rank 0. If a design is proximity corrected pattern elements will be assigned to different shot ranks. The shot time modulation is a simple percentage increase to the base dose defined by the RESIST command in the SDF. The modulation table in this example will thus expose with a base dose of 200 µC/cm<sup>2</sup> in element (1,1) and a dose of 200 µC/cm<sup>2</sup> + 45% = 290 µC/cm<sup>2</sup> in element (10,1). The resulting pattern and modulation is visualised below.
Each array element is assigned a dose modulation using the MODULAT command. The MODULAT command takes two parameters as MODULAT(r,v), where r is the shot rank and v is the shot time modulation in %. The shot rank is defined during export from Beamer. For a simple design as used in this example that is not proximity corrected all elements of the pattern will be in shot rank 0. If a design is proximity corrected pattern elements will be assigned to different shot ranks. The shot time modulation is a simple percentage increase to the base dose defined by the RESIST command in the SDF. The modulation table in this example will thus expose with a base dose of 200 µC/cm<sup>2</sup> in element (1,1) and a dose of 200 µC/cm<sup>2</sup> + 45% = 290 µC/cm<sup>2</sup> in element (10,1). The resulting pattern and modulation is visualised below.
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