Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions
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File:Contour Plot Y32 EM_02_30 blue to red.jpg | File:Contour Plot Y32 EM_02_30 blue to red.jpg| Uniformity: +- 6.4% | ||
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File:Contour Plot Y33 EM_0_0 blue to red.jpg | File:Contour Plot Y33 EM_0_0 blue to red.jpg| Uniformity: +-1.7% | ||
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