Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions
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|Electromagnetic coils (EM) 'outer coil' / 'inner coil' | |Electromagnetic coils (EM) 'outer coil' / 'inner coil' | ||
|'2 A' / '30 A' | |'2 A' / '30 A' (PLEASE DO NOT RUN WITH THESE SETTINGS FOR MORE THAN 6 MIN) | ||
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