Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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! Nominal line width | ! Nominal line width | ||
! colspan="8" align="center"| Etched depths | ! colspan="8" align="center"| Etched depths (nm) | ||
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! 30 nm | ! 30 nm | ||
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! Nominal line width | ! Nominal line width | ||
! colspan="8" align="center"| Etch rates in trenches | ! colspan="8" align="center"| Etch rates in trenches (nm/min) | ||
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!30 nm | !30 nm | ||
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! colspan="8" align="center"| Etch rates in zep resist | ! colspan="8" align="center"| Etch rates in zep resist (nm/min) | ||
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! zep | ! zep | ||