Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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! colspan="8" align="center"| Etch rates in trenches | |||
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!30 nm | !30 nm | ||
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|225 | |225 | ||
|280 | |280 | ||
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| | |||
! colspan="8" align="center"| Etch rates in trenches | |||
|- | |- | ||
!30 nm | !30 nm | ||