Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 14: | Line 14: | ||
!Sinano3.6 | !Sinano3.6 | ||
|- | |- | ||
!Cl<sub>2</sub> | !Cl<sub>2</sub> (sccm) | ||
|0 | |0 | ||
|0 | |0 | ||
| Line 24: | Line 24: | ||
|15 | |15 | ||
|- | |- | ||
!BCl<sub>3</sub> | !BCl<sub>3</sub> (sccm) | ||
|5 | |5 | ||
|3 | |3 | ||
| Line 34: | Line 34: | ||
|5 | |5 | ||
|- | |- | ||
!HBr | !HBr (sccm) | ||
|15 | |15 | ||
|17 | |17 | ||
| Line 44: | Line 44: | ||
|0 | |0 | ||
|- | |- | ||
! Coil power (W) | |||
|900 | |||
|900 | |||
|900 | |||
|900 | |||
|900 | |||
|900 | |||
|900 | |||
|900 | |||
|- | |||
!Platen power (W) | |||
|50 | |||
|50 | |||
|60 | |||
|75 | |||
|90 | |||
|60 | |||
|60 | |||
|60 | |||
|- | |||
! Process time (s) | |||
|150 | |||
|180 | |||
|120 | |||
|180 | |||
|120 | |||
|90 | |||
|120 | |||
|180 | |||
|} | |} | ||