Specific Process Knowledge/Characterization/MicroSpectroPhotometer (Craic 20/30 PV): Difference between revisions
Appearance
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==Performance== | ==Performance== | ||
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|bgcolor="#5CACEE" |'''Technical specifications of the objectives''' | |||
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{|{{table}} | |||
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!colspan="5" border="none" style="background:silver; color:black;" align="center"| 10X Ultrafluar Objective | |||
|- | |||
|style="background:WhiteSmoke; color:black"|<b>Power (W)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Pressure (mTorr)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Time (s)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Total Thickness (nm)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Deposition rate (nm/s)</b> | |||
|- | |||
|500 | |||
|3 | |||
|183 | |||
|94.2 | |||
|<p style="color:red;"><b>0.51</b></p> | |||
|- | |||
|400 | |||
|3 | |||
|228 | |||
|94.1 | |||
|<p style="color:red;"><b>0.41</b></p> | |||
|- | |||
|300 | |||
|3 | |||
|304 | |||
|93.53 | |||
|<p style="color:red;"><b>0.31</b></p> | |||
|- | |||
|200 | |||
|3 | |||
|456 | |||
|92.61 | |||
|<p style="color:red;"><b>0.2</b></p> | |||
|- | |||
|100 | |||
|3 | |||
|913 | |||
|89.99 | |||
|<p style="color:red;"><b>0.1</b></p> | |||
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{| border="2" cellspacing="2" cellpadding="5" align="center" | |||
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!colspan="5" border="none" style="background:silver; color:black;" align="center"| 40X Ultrafluar Objective | |||
|- | |||
|style="background:WhiteSmoke; color:black"|<b>Power (W)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Pressure (mTorr)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Time (s)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Total Thickness (nm)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Deposition rate (nm/s)</b> | |||
|- | |||
|500 | |||
|8 | |||
|183 | |||
|94.2 | |||
|<p style="color:red;"><b>0.43</b></p> | |||
|- | |||
|400 | |||
|8 | |||
|228 | |||
|94.1 | |||
|<p style="color:red;"><b>0.33</b></p> | |||
|- | |||
|300 | |||
|8 | |||
|304 | |||
|93.53 | |||
|<p style="color:red;"><b>0.24</b></p> | |||
|- | |||
|200 | |||
|8 | |||
|456 | |||
|92.61 | |||
|<p style="color:red;"><b>0.15</b></p> | |||
|- | |||
|100 | |||
|8 | |||
|913 | |||
|89.99 | |||
|<p style="color:red;"><b>0.06</b></p> | |||
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==Examples== | ==Examples== | ||