Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Advanced Field alignment (TSA)== | ==Advanced Field alignment (TSA)== | ||
'''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | '''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | ||
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| 150 ±50 | | 150 ±50 | ||
| 128 ±50 | | 128 ±50 | ||
<!-- | |||
|- | |- | ||
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| 0 ±50 | | 0 ±50 | ||
| 16 ±50 | | 16 ±50 | ||
--> | |||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||