Specific Process Knowledge/Characterization/SEM Gemini 1/ma: Difference between revisions
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= Safety= | = Safety= | ||
==Use only if correctly instructed == | |||
The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure: | The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure: | ||
* Instrument safety: If not correctly operated, the instrument may suffer | * Instrument safety: If not correctly operated, the instrument may suffer irreparable damage. | ||
* User value: The level of sophistication is very high so unless correctly instructed, chances are that a certain mode may be incorrectly applied and the user will only waste time. | * User value: The level of sophistication is very high so unless correctly instructed, chances are that a certain mode may be incorrectly applied and the user will only waste time. | ||
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# Loading 150 mm wafers | # Loading 150 mm wafers | ||
# Tandem deceleration | # Tandem deceleration | ||
== Noise cancellation systems == | |||
The cleanroom is far from being the optimum environment for the SEM Gemini 1 as there are too many sources of noise - whether they are acoustic, mechanic, electric or magnetic of nature. To suppress the impact of some of these sources of noise, the instrument is equipped with the following: | |||
# A Spicer Consulting SC24 Field Cancellation system: A frame with cancellation coils and controller | |||
# A TableStable Active Antivibration platform: Platform underneath the SEM and controller | |||
It is essential that these systems be respected as an integral part of the instrument. | |||
= Instrument features = | |||
# Airlock | |||
# Image Navigation | |||
# Plasma cleaner | |||
# | |||