Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer

From the external Beamer PC it is possible to remotely compile job files on the JEOL Compilation Computer, thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer.

The following describes how to move files to the JEOL Compilation Computer and how to remotely access it from the external Beamer PC.

Moving files with FFFTP

Files are moved with FFFTP. First time you have to set up and save the connection. To do this open FFFTP and click New Host.... Use the following settings:

• Profile Name: JEOL Compilation Computer
• Host Name/Address: 10.128.40.186
• Username: jeoleb
• Password/Phrase: Jeoleb
• Initial Local Folder: This is your source folder, click the three ... and link to your M-drive or similar
• Initial Host Folder: /home/eb0/jeoleb/pattern/danchipv30

Then click OK and Connect. FFFTP will now open with your source folder on the left and destination on the right. V30 files are placed in one folder while SDF/JDF/JDI are placed in another folder. The folder structure is identical to the JEOL 9500 computer and is:

• SDF/JDF/JDI: /home/eb0/jeoleb/job/danchip
• V30: /home/eb0/jeoleb/pattern/danchipv30