Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
Low Res camera | '''Low Res camera''' | ||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
Fast exposure | '''Fast exposure''' | ||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|2 alignment marks | |rowspan="2"|'''2''' alignment marks | ||
(Taran Apr 2023) | (Taran Apr 2023) | ||