Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Advanced Field alignment (TSA)== | ==Advanced Field alignment (TSA)== | ||
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<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | <span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | ||
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'''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | '''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | ||
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!Average [nm] | !Average [nm] | ||
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|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|25 fields | |||
375 nm, high res camera | |||
(Taran Sep 2023) | |||
|'''X''' | |||
| 450 ±75 | |||
| 438 ±75 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 200 ±50 | |||
| 212 ±50 | |||
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