Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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*Previously there was a limit on the number of future bookings a user could have. There is no such defined limit any longer. We will of course not allow a single user to take up an unreasonable fraction of the time on the tool though. | *Previously there was a limit on the number of future bookings a user could have. There is no such defined limit any longer. We will of course not allow a single user to take up an unreasonable fraction of the time on the tool though. | ||
*Long exposure will always be placed at the end of a day to free up day time for shorter exposures. | |||