Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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*Slot assignments are personal. The person requesting the exposure must also carry out the exposure. If there is a sudden need for a colaborating colleague to take over the exposure due to illness or similar you must notify the EBL staff. We must at all times know who is actually running the system. | *Slot assignments are personal. The person requesting the exposure must also carry out the exposure. If there is a sudden need for a colaborating colleague to take over the exposure due to illness or similar you must notify the EBL staff. We must at all times know who is actually running the system. | ||