Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
| Line 25: | Line 25: | ||
'''SDF filename(s):''' Please provide the name of the SDF file(s). | '''SDF filename(s):''' Please provide the name of the SDF file(s). | ||
'''Prealignment:''' Please indicate if you need prealignment | '''Prealignment:''' Please indicate if you need prealignment. | ||
==Usage conditions== | ==Usage conditions== | ||