Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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'''Job files:''' Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form. Indicate whether the job files are on the JEOL 9500 system or on the Cleanroom drive. | '''Job files:''' Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form. Indicate whether the job files are on the JEOL 9500 system or on the Cleanroom drive. | ||
'''SDF filename(s):''' Please provide the name of the SDF | '''SDF filename(s):''' Please provide the name of the SDF file(s). | ||
'''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | '''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | ||