Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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'''Cassette and window:''' Select the window(s) you would like to use. You do not ''need'' to select a cassette. You ''can'' however select a particular cassette if for some reason you have a preference between two (in principle) identical cassettes. If you do select a particular cassette please let us know in the comment field why you need that particular cassette. | '''Cassette and window:''' Select the window(s) you would like to use. You do not ''need'' to select a cassette. You ''can'' however select a particular cassette if for some reason you have a preference between two (in principle) identical cassettes. If you do select a particular cassette please let us know in the comment field why you need that particular cassette. | ||
'''Job files:''' Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form. | '''Job files:''' Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form. Indicate whether the job files are on the JEOL 9500 system or on the Cleanroom drive. | ||
'''SDF filename(s):''' Please provide the name of the SDF files(s). | '''SDF filename(s):''' Please provide the name of the SDF files(s). | ||
'''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | '''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | ||
==Usage conditions== | ==Usage conditions== | ||