Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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'''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | '''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | ||
==Usage conditions== | |||
*Exposures must start as soon as possible in a given slot. Hence the user must have the substrate(s) mounted (and prealigned if needed) such that the cassette can be loaded immediately when the booking starts. | |||
*If your substrate for some reason can not be ready in time you must notify us on the request email as soon as possible. | |||
*Minor updates to job files between submission and exposure are allowed. However, if we see that users submit jobs only to obtain a slot and then execute completely different jobs | |||
=Request for exposure by Nanolab= | =Request for exposure by Nanolab= | ||
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | ||