Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
| Line 10: | Line 10: | ||
'Username:' Please provide your Labmanger username in the username field. | '''Username:''' Please provide your Labmanger username in the username field. | ||
''Date and time:'' Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you. | '''Date and time:''' Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you. | ||
''Cassette and window:'' | '''Cassette and window:''' | ||
=Request for exposure by Nanolab= | =Request for exposure by Nanolab= | ||
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | ||
Revision as of 09:04, 8 September 2023
Request for user exposure slot
As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign a user a slot of an appropriate length for the exposure. We will try and group exposure jobs together to minimize cassette changes by loading multiple substrates in a single cassette whenever possible.
The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk.
Request form guide
Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files.
Username: Please provide your Labmanger username in the username field.
Date and time: Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you.
Cassette and window:
Request for exposure by Nanolab
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users.