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Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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# H<sub>2</sub>O : H<sub>3</sub>PO<sub>4</sub>  (1:2) at 50°C
# H<sub>2</sub>O : H<sub>3</sub>PO<sub>4</sub>  (1:2) at 50°C
# Pre-mixed etch solution: PES 77-19-04 at 20°C
# Pre-mixed etch solution: Aluminum etch 80-15-3-2 at 20°C


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<br>
The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Nanolab if you need to use the PES 77-19-04 etch mixture. Since it is used only very rarely it will probably have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures.
The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Nanolab if you need to use the Aluminum etch 80-15-3-2 etch mixture. Since it is used only very rarely it will probably have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures.




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!  
!  
! Aluminium Etch
! Aluminium Etch
! Etch with PES 77-19-4
! Etch with Aluminum etch 80-15-3-2
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[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0xFTEZMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Kemibrug SDS: Phosphoric acid >25%]  
[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0xFTEZMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Kemibrug SDS: Phosphoric acid >25%]  
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[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGTktIVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Kemibrug SDS: Phosphoric acid etch slution]  
https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkZLR0tOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Kemibrug SDS: Phosphoric acid etch slution]  
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!Chemical solution
!Chemical solution
|H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2
|H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2
|PES 77-19-04:  
|Aluminum etch 80-15-3-2:  
77 vol% H<sub>3</sub>PO<sub>4</sub> 85%  
60-90 vol% H<sub>3</sub>PO<sub>4</sub> 85%  


19 vol% CH<sub>3</sub>COOH 100%
5-20 vol% CH<sub>3</sub>COOH 100%


4 vol% HNO<sub>3</sub> 70%  
1-5 vol% HNO<sub>3</sub> 70%  
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