Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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Coordinate system is regular orientation when cassette is viewed from the front and hook placed to the right. | Coordinate system is regular orientation when cassette is viewed from the front and hook placed to the right. | ||
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==Chip cassette slot dimensions== | |||
The slots on chip cassettes are in all cases 70 mm wide. The height of the slots are slot dependent and are: | |||
*3A: 20 mm | |||
*3B: 12 mm | |||
*3C: 8 mm | |||
*3D: 4 mm | |||
The substrate must overlap at least 0.5 mm on both sides of the slot. Hence the height of a chip must be at least 1 mm larger than the slot height, i.e. in order to use slot 3B the chip height must be at least 13.0 mm. | |||
== Cassette overview == | == Cassette overview == | ||