Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch: Difference between revisions
Appearance
No edit summary |
|||
| Line 49: | Line 49: | ||
|- | |- | ||
|} | |} | ||
{| border="2" cellspacing="2" cellpadding="3" | {| border="2" cellspacing="2" cellpadding="3" | ||