Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch: Difference between revisions
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|Etch rate in Si | |Etch rate in Si | ||
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Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
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| Line 74: | Line 74: | ||
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|Etch rate in Si | |Etch rate in Si | ||
|? | |?nm/min | ||
|? nm/min | |? nm/min | ||
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