Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch: Difference between revisions
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===Etch rate uniformity=== | |||
<gallery> | |||
File:SRN etch uniformity DOE2_Post_II_21.jpg | |||
File:SRN etch uniformity SiO2_res_10.jpg | |||
</gallery> | |||