Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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''Extraction type:'' Allows extraction of single cells of a design or a drawn region. In the example shown below a region has been drawn in the viewer by simply Shift-left clicking to select the region. The corners of a region can also be entered nummerically. Multiple regions can be defined for extraction. By clicking the ''Exclude Region(s)/Instance'' the selected parts can be omitted from the rest of the pattern instead. | ''Extraction type:'' Allows extraction of single cells of a design or a drawn region. In the example shown below a region has been drawn in the viewer by simply Shift-left clicking to select the region. The corners of a region can also be entered nummerically. Multiple regions can be defined for extraction. By clicking the ''Exclude Region(s)/Instance'' the selected parts can be omitted from the rest of the pattern instead. | ||
''Region Layer:'' A layer of the design can be used to define regions for extraction. | |||
''Dose Classification:'' The dose modulation table (if any is present from PEC) can be truncated with the ''Shrink'' option to reflect the extracted region. | ''Dose Classification:'' The dose modulation table (if any is present from PEC) can be truncated with the ''Shrink'' option to reflect the extracted region. | ||