Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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''Size:'' Size of the main writing field, maximum size is 1000 x 1000 µm. | ''Size:'' Size of the main writing field, maximum size is 1000 x 1000 µm. | ||
''Fracture mode:'' This can be used to alter the way Beamer fractures the geometry into trapezoidal shapes. The options in the export module are fairly limited, much more control can be gained by using a ''Fracture'' node. | ''Fracture mode:'' This can be used to alter the way Beamer fractures the geometry into trapezoidal shapes. The options in the export module are fairly limited, much more control can be gained by using a ''Fracture'' node. See the ''Fracture'' node for more details. | ||
''Feature Sorting in Field:'' Can be used to alter the writing order of pattern elements in each writing field. The actual result of these choices can be somewhat hard to predict. After export the result can be seen in the Viewer under ''Tool'' and either ''Show Traversal Path'' or ''Show Writing Order''. | ''Feature Sorting in Field:'' Can be used to alter the writing order of pattern elements in each writing field. The actual result of these choices can be somewhat hard to predict. After export the result can be seen in the Viewer under ''Tool'' and either ''Show Traversal Path'' or ''Show Writing Order''. | ||