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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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===Import===
===Import===
The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. The options available are:
The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. Import options differ somewhat between formats, for GDS import the options available are:
 
''Layer Set:'' Allows import of only a selected range of layers.


''Import Zero Width Paths:'' Allows polygonal paths to be imported with a defined width, i.e. convert a 1D wire to a 2D structure.
''Import Zero Width Paths:'' Allows polygonal paths to be imported with a defined width, i.e. convert a 1D wire to a 2D structure.
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''Import Boxes:'' Some design tools use "area boxes", a special type of geometry that is not considered a polygon. These can be converted to polygons with this option.
''Import Boxes:'' Some design tools use "area boxes", a special type of geometry that is not considered a polygon. These can be converted to polygons with this option.
''Ignore text, Load Text, Text as Polygon:'' Either ignores text objects, imports them as text objects or converts them to polygons. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if the design originates from CleWin.
''Generic curve:'' Allows the detection of special shapes (format depended) early in the process to improve correction and fracturing.


''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file.
''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file.


''Flatten Layout:'' Flattens the layout to one layer and one cell.
''Flatten Layout:'' Flattens the layout to one layer and one cell.
''Load Text Elements:'' Imports text objects. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if working with CleWin.
''Convert Elements to Polygons:'' Allows read text elements to be converted to polygons of a chosen size.
''Curve Detection:'' Detects curves and allows refinement of curve accuracy.


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