Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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Illustration of ''Share between Fields'' overlap. On the left side the overlap distance is 0, i.e. no overlap. The rods are simply along the main field boundary. On the right side an overlap has been introduced such that the line of rods at the boundary is entirely placed in either of the writing fields and hence will not be stitched across two fields. | Illustration of ''Share between Fields'' overlap. On the left side the overlap distance is 0, i.e. no overlap. The rods are simply along the main field boundary. On the right side an overlap has been introduced such that the line of rods at the boundary is entirely placed in either of the writing fields and hence will not be stitched across two fields. | ||
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| [[image:BEAMER_Interleave1.png|300px]] [[image:BEAMER_Interleave2.png|300px]] | |||
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Illustration of the ''Interleave'' overlap methods. On the left side ''Interleaving'' is used to interleave the structures at the main field boundary between the fields. On the right side "Interleaving + extra field'' is used to interleave but also add an additional writing field for the interleaved part. | |||
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