Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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-| [[image:BEAMER_Share1.png|300px]]  [[image:BEAMER_Share2.png|300px]]
+| [[image:BEAMER_Share2.png|300px]]  [[image:BEAMER_Share1.png|300px]]
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-Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''.
+Illustration of ''Share between Fields'' overlap. On the left side the overlap distance is 0, i.e. no overlap. The rods are simply along the main field boundary. On the right side an overlap has been introduced such that the line of rods at the boundary is entirely placed in either of the writing fields and hence will not be stitched across two fields.
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