Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''. | Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''. | ||
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''Trapezoids:'' Controls the direction of fractured trapezoid shapes, if they can be in both x- and y-directions or only one of them. | |||
===ChipPlace=== | ===ChipPlace=== | ||