Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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''Beam Step Size Correction:'' | ''Beam Step Size Correction:'' | ||
'' | ''Fracturing mode'' determines the method used for fracturing. | ||
*''Conventional:'' The conventional algorithm performs mainly horizontal fractures at polygon vertices that maintain the original design intent as good as possible. This leads to many slices of trapezoids to best represent the original layout. | *''Conventional:'' The conventional algorithm performs mainly horizontal fractures at polygon vertices that maintain the original design intent as good as possible. This leads to many slices of trapezoids to best represent the original layout. | ||
*''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids. | *''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids. | ||