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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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*''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids.
*''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids.
*''Curved:'' This algorithm should typically be used to fracture circles and rings. This mode allows BEAMER to shift the vertices along curves to get fractures consistent with the specified resolution and beam step size. In other words, this mode will try to detect curves in the given polygons and fracture these curves within a specified tolerance consistent with the specified resolution and beam step size.
*''Curved:'' This algorithm should typically be used to fracture circles and rings. This mode allows BEAMER to shift the vertices along curves to get fractures consistent with the specified resolution and beam step size. In other words, this mode will try to detect curves in the given polygons and fracture these curves within a specified tolerance consistent with the specified resolution and beam step size.
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
| [[image:BEAMER_Conventional.png|300px]] | [[image:BEAMER_LRFT.png|300px]] | [[image:BEAMER_Curved.png|300px]]
|-
| colspan="3" style="text-align:center;|
Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''.
|}


===ChipPlace===
===ChipPlace===
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