Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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===Fracture=== | ===Fracture=== | ||
Before pattern writing the polygons of a design must be fractured into trapezoids filled with beam/shot positions. Careful setup of how a design is fractured and shots are placed can greatly enhance the end result both in terms of critical dimension accuracy, line edge roughness and pattern stitching between writing fields. | |||
===ChipPlace=== | ===ChipPlace=== | ||